Editorial: e-Manufacturing in the semiconductor industry

IEEE Transactions on Automation Science and Engineering

Volumn 4, Issue 4, 2007, Pages 485-487

  Zhang, Mike Tao ^a   Fowler, John ^b   Chen, Thomas W Y ^c   Shanthikumar, J George ^d   Chien, Chen Fu ^e  

^a Submicron Development Center   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

^c TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 35348916789     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2007.907381     Document Type: Editorial

References (3)

1. D. Pillai, "Factory integration breakthrough opportunities," IEEE Robot. Autom. Mag., Dec. 2006.
2. C. Mouli and W. Carriker, "Future fab: How software is helping Intel go nano and beyond," IEEE Spectrum, Mar. 2007.
3. L. Peters, "Technology is no longer king," Semiconduct. Int., Jun. 2007.