Optical measurement of thermal deformation of multilayer optics under synchrotron radiation

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 582, Issue 1, 2007, Pages 142-145

  Revesz, P ^a   Kazimirov, A ^a   Bazarov, I ^a  

^a CHESS ^*  (United States)

Author keywords

Heat bump; High heat load optics; Optical metrology; Surface profile measurement; Synchrotron radiation

Indexed keywords

MONOCHROMATORS; OPTICAL MULTILAYERS; SYNCHROTRON RADIATION; THERMAL EFFECTS; THERMAL LOAD;

HEAT BUMP; HIGH HEAT-LOAD OPTICS; OPTICAL METROLOGY; SURFACE PROFILE MEASUREMENT;

DEFORMATION;

EID: 35348904430     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2007.08.093     Document Type: Article

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