Deterministic processing of alumina with ultrashort laser pulses

Journal of Applied Physics

Volumn 102, Issue 7, 2007, Pages

  Furmanski, J ^a   Rubenchik, A M ^b   Shirk, M D ^b   Stuart, B C ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; LASER BEAMS; MACHINING; PARAMETER ESTIMATION; TRENCHING;

INCIDENT FLUENCES; RASTER SCANNING; REMOVAL RATE; TRENCH GEOMETRY;

ULTRASHORT PULSES;

EID: 35348892053     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2794376     Document Type: Article

References (5)

1. B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. B 0163-1829 10.1103/PhysRevB.53.1749 53, 1749 (1996).
2. M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, J. Appl. Phys. 0021-8979 10.1063/1.370197 85, 6803 (1999).
3. E. E. B. Campbell, D. Ashkenasi, and A. Rosenfeld, Mater. Sci. Forum 301, 123 (1999).
4. M. D. Feit, A. M. Komashko, and A. M. Rubenchik, Appl. Phys A: Mater. Sci. Process. 79, 1657 (2004).
5. W. Perrie, A. Rushton, M. Gill, P. Fox, and W. O'Neill, Appl. Surf. Sci. 248, 213 (2005). 0169-4332