Inductively coupled RF oxygen plasma characterization by optical emission spectroscopy

Vacuum

Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 224-227

  Cvelbar, Uroš ^a   Krstulović, Nikša ^b   Milošević, Slobodan ^b   Mozetič, Miran ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b INSTITUTE OF PHYSICS   (Croatia)

Author keywords

Emission spectroscopy; Oxygen; Plasma; RF discharge

Indexed keywords

BAND STRUCTURE; CHARACTERIZATION; IONIZATION; MOLECULAR OXYGEN; OPTICAL EMISSION SPECTROSCOPY;

ATOMIC LINES; OPTICAL SPECTROMETERS; RF DISCHARGES; RF OXYGEN PLASMA;

INDUCTIVELY COUPLED PLASMA;

EID: 35248892855     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.016     Document Type: Article

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