Cluster size prediction in pulsed laser deposited films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6606, Issue , 2007, Pages

  Bailini, Alessandro ^a   Ossi, Paolo M ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Buffer gas; Cluster synthesis; Modelling; Plume dynamics; Pulsed laser deposition

Indexed keywords

CLUSTER ANALYSIS; DIFFUSION; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PULSED LASER DEPOSITION; SIZE DISTRIBUTION;

ATOM AGGREGATES; PLUME DYNAMICS;

THIN FILMS;

EID: 35148878232     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.729583     Document Type: Conference Paper

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