Novel double pulse laser method for synthesis of carbon nitride films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6606, Issue , 2007, Pages

  Kuzyakov, Yu Ya ^a   Lednev, V N ^a   Zorov, N B ^a   Voronina, R D ^a   Gordienko, V M ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Carbon nitride; Double pulse; PLD

Indexed keywords

CARBON NITRIDE FILMS; DOUBLE PULSE LASER METHODS;

CARBON NITRIDE; CHARACTERIZATION; PULSED LASER DEPOSITION; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

THIN FILM CIRCUITS;

EID: 35148846444     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.730197     Document Type: Conference Paper

References (4)

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4. M. Han, Y. Gong, J. Zhou, C. Yin, F. Song, N. Muto, T. Takiya, Y. Iwata, "Plume dynamics during film and nanoparticles deposition by pulsed laser ablation", Phys.Lett. A., 302, 182-189 (2002)