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Volumn 263, Issue 2, 2007, Pages 497-502

Sputtering of graphite in pulsed and continuous arc and spark discharges

Author keywords

Arc and spark discharge; Graphite; Sputtering

Indexed keywords

CARBON CLUSTERS; CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRODES; EMISSION SPECTROSCOPY; ION SOURCES; SPUTTERING; TEMPERATURE MEASUREMENT;

EID: 34948822848     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.07.005     Document Type: Article
Times cited : (8)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.