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Volumn 263, Issue 2, 2007, Pages 497-502
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Sputtering of graphite in pulsed and continuous arc and spark discharges
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Author keywords
Arc and spark discharge; Graphite; Sputtering
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Indexed keywords
CARBON CLUSTERS;
CARRIER CONCENTRATION;
ELECTRIC DISCHARGES;
ELECTRODES;
EMISSION SPECTROSCOPY;
ION SOURCES;
SPUTTERING;
TEMPERATURE MEASUREMENT;
POPULATION LEVEL DENSITIES;
SPARK DISCHARGES;
VIBRATIONAL TEMPERATURES;
GRAPHITE;
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EID: 34948822848
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2007.07.005 Document Type: Article |
Times cited : (8)
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References (16)
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