Microelectromechanical resonator characterization using noncontact parametric electrostatic excitation and probing

Journal of Microelectromechanical Systems

Volumn 16, Issue 5, 2007, Pages 1054-1060

  Cheng, Karmun M ^a,b   Weng, Z ^a,c   Oliver, Derek R ^a   Thomson, D J ^a   Bridges, G E ^a  

^a UNIVERSITY OF MANITOBA   (Canada)

^b Micralyne Inc   (Canada)

^c Scanimetrics Inc   (Canada)

Author keywords

Coupled resonator system; Electrostatic force microscopy (EFM); Microelectromechanical (MEM) devices; Microresonators; Testing

Indexed keywords

ELECTROSTATIC FORCE; LIGHT INTERFERENCE; MICROMACHINING; NATURAL FREQUENCIES; RESONATORS; SCANNING PROBE MICROSCOPY;

COUPLED OSCILLATOR MODEL; COUPLED RESONATOR SYSTEM; ELECTROSTATIC FORCE MICROSCOPY; NONCONTACT ELECTROSTATIC PROBING;

MEMS;

EID: 34948819215     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.901116     Document Type: Article

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