Plasma characterization of cross-beam pulsed-laser ablation used for carbon thin film deposition

Thin Solid Films

Volumn 516, Issue 1, 2007, Pages 8-12

  Sanchez Ake C ^a   Sobral, H ^a   Villagran Muniz M ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Diamond like carbon; Plasma diagnostics; Pulsed laser deposition; Raman spectroscopy

Indexed keywords

CARBON FILMS; DEPOSITION; KINETIC ENERGY; LASER ABLATION; LASER BEAMS; PLASMA DIAGNOSTICS; RAMAN SPECTROSCOPY;

DIAMOND-LIKE CARBON; LASER-INDUCED PLUME PROPAGATION; PULSED-LASER DEPOSITION;

THIN FILMS;

EID: 34748922205     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.04.043     Document Type: Article

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