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Volumn 22, Issue 9, 2007, Pages 2623-2630

High carrier concentrations of n- and p-doped GaN on Si(111) by nitrogen plasma-assisted molecular-beam epitaxy

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DOPING (ADDITIVES); HOLE CONCENTRATION; MOLECULAR BEAM EPITAXY; MORPHOLOGY; OPTICAL PROPERTIES; SEMICONDUCTING SILICON;

EID: 34748905331     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0336     Document Type: Article
Times cited : (14)

References (44)
  • 3
    • 0035831836 scopus 로고    scopus 로고
    • Bright blue electro-luminescence from an InGaN/GaN multiquantum-well diode on Si(111): Impact of an AlGaN/GaN multilayer
    • A. Dadgar, J. Christen, T. Riemann, S. Richter, J. Blaesing, A. Diez, A. Krost, A. Alam, and M. Heuken: Bright blue electro-luminescence from an InGaN/GaN multiquantum-well diode on Si(111): Impact of an AlGaN/GaN multilayer. Appl. Phys. Lett. 78, 2211 (2001).
    • (2001) Appl. Phys. Lett , vol.78 , pp. 2211
    • Dadgar, A.1    Christen, J.2    Riemann, T.3    Richter, S.4    Blaesing, J.5    Diez, A.6    Krost, A.7    Alam, A.8    Heuken, M.9
  • 5
    • 0032091463 scopus 로고    scopus 로고
    • Effect of very thin SiC layer on heteroepitaxial growth of cubic GaN on Si (001)
    • Y. Hiroyama and M. Tamura: Effect of very thin SiC layer on heteroepitaxial growth of cubic GaN on Si (001). Jpn. J. Appl. Phys. 37, L630 (1998).
    • (1998) Jpn. J. Appl. Phys , vol.37
    • Hiroyama, Y.1    Tamura, M.2
  • 8
    • 21544461149 scopus 로고
    • Deposition of highly resistive, undoped, and p-type, magnesium-doped gallium nitride films by modified gas source molecular beam epitaxy
    • C. Wang and R.F. Davis: Deposition of highly resistive, undoped, and p-type, magnesium-doped gallium nitride films by modified gas source molecular beam epitaxy. Appl. Phys. Lett. 63, 990 (1993).
    • (1993) Appl. Phys. Lett , vol.63 , pp. 990
    • Wang, C.1    Davis, R.F.2
  • 9
    • 36449007167 scopus 로고
    • Blue-violet light emitting gallium nitride p-n junctions grown by electron cyclotron resonance-assisted molecular beam epitaxy
    • R.J. Molnar, R. Singh, and T.D. Moustakas: Blue-violet light emitting gallium nitride p-n junctions grown by electron cyclotron resonance-assisted molecular beam epitaxy. Appl. Phys. Lett. 66, 268 (1995).
    • (1995) Appl. Phys. Lett , vol.66 , pp. 268
    • Molnar, R.J.1    Singh, R.2    Moustakas, T.D.3
  • 11
    • 0027559550 scopus 로고
    • Far-infrared spectroscopy of phonons and plasmons in semiconductor superlattices
    • T. Dumelow, T.J. Parker, S.R.P. Smith, and D.R. Tilley: Far-infrared spectroscopy of phonons and plasmons in semiconductor superlattices. Surf. Sci. Rep. 37, 151 (1993).
    • (1993) Surf. Sci. Rep , vol.37 , pp. 151
    • Dumelow, T.1    Parker, T.J.2    Smith, S.R.P.3    Tilley, D.R.4
  • 12
    • 36149010085 scopus 로고
    • On the polar vibrations of alkali halides
    • R.H. Lyddane, R.G. Sachs, and E. Teller: On the polar vibrations of alkali halides. Phys. Rev. 59, 673 (1941).
    • (1941) Phys. Rev , vol.59 , pp. 673
    • Lyddane, R.H.1    Sachs, R.G.2    Teller, E.3
  • 13
    • 36449006640 scopus 로고
    • Microstructure of AlN on Si (111) grown by plasma-assisted molecular-beam epitaxy
    • K.S. Stevens, A. Ohtani, M. Kinnigurgh, and R. Beresford: Microstructure of AlN on Si (111) grown by plasma-assisted molecular-beam epitaxy. Appl. Phys. Lett. 65, 321 (1994).
    • (1994) Appl. Phys. Lett , vol.65 , pp. 321
    • Stevens, K.S.1    Ohtani, A.2    Kinnigurgh, M.3    Beresford, R.4
  • 14
    • 0000928009 scopus 로고
    • Strain effects in epitaxial GaN grown on AlN-buffered Si(111)
    • W.J. Meng and T.A. Perry: Strain effects in epitaxial GaN grown on AlN-buffered Si(111). J. Appl. Phys. 76, 7824 (1994).
    • (1994) J. Appl. Phys , vol.76 , pp. 7824
    • Meng, W.J.1    Perry, T.A.2
  • 15
    • 0032331539 scopus 로고    scopus 로고
    • Molecular beam epitaxial growth of AlN single crystalline films on Si (111) using radio-frequency plasma assisted nitrogen radical source
    • K. Yasutake, A. Takeuchi, H. Kakiuchi, and K. Yoshii: Molecular beam epitaxial growth of AlN single crystalline films on Si (111) using radio-frequency plasma assisted nitrogen radical source. J. Vac. Sci. Technol., A 16, 2140 (1998).
    • (1998) J. Vac. Sci. Technol., A , vol.16 , pp. 2140
    • Yasutake, K.1    Takeuchi, A.2    Kakiuchi, H.3    Yoshii, K.4
  • 16
    • 0028764150 scopus 로고
    • Microstructure and photoluminescence of GaN grown on Si(111) by plasma-assisted molecular-beam epitaxy
    • A. Ohtani, K.S. Stevens, and R. Beresford: Microstructure and photoluminescence of GaN grown on Si(111) by plasma-assisted molecular-beam epitaxy. Appl. Phys. Lett. 65, 61 (1994).
    • (1994) Appl. Phys. Lett , vol.65 , pp. 61
    • Ohtani, A.1    Stevens, K.S.2    Beresford, R.3
  • 17
    • 0038606430 scopus 로고    scopus 로고
    • E. Calleja, M.A. Sanchez-Garcia, F.J. Sanchez, F. Calle, F.B. Naranjo, E. Munoz, S.I. Molina, A.M. Sanchez, F.J. Pacheco, and R. Garcia: Growth of III-nitrides on Si(1 1 1) by molecular beam epitaxy Doping, optical, and electrical properties. J. Cryst. Growth 201/202, 296 (1999).
    • E. Calleja, M.A. Sanchez-Garcia, F.J. Sanchez, F. Calle, F.B. Naranjo, E. Munoz, S.I. Molina, A.M. Sanchez, F.J. Pacheco, and R. Garcia: Growth of III-nitrides on Si(1 1 1) by molecular beam epitaxy Doping, optical, and electrical properties. J. Cryst. Growth 201/202, 296 (1999).
  • 19
    • 0037292512 scopus 로고    scopus 로고
    • A. Reiher, J. Blasing, A. Dadgar, A. Diez, and A. Krost: Efficient stress relief in GaN heteroepitaxy on Si(1 1 1) using low-temperature AlN interlayers. J. Cryst. Growth 248, 563 (2003).
    • A. Reiher, J. Blasing, A. Dadgar, A. Diez, and A. Krost: Efficient stress relief in GaN heteroepitaxy on Si(1 1 1) using low-temperature AlN interlayers. J. Cryst. Growth 248, 563 (2003).
  • 20
    • 36448998638 scopus 로고
    • Microstructural characterization of α-GaN films grown on sapphire by organometallic vapor phase epitaxy
    • W. Qian, M. Skowronski, and M. De Graef: Microstructural characterization of α-GaN films grown on sapphire by organometallic vapor phase epitaxy. Appl. Phys. Lett. 66, 1252 (1995).
    • (1995) Appl. Phys. Lett , vol.66 , pp. 1252
    • Qian, W.1    Skowronski, M.2    De Graef, M.3
  • 21
    • 0000605405 scopus 로고    scopus 로고
    • Structural properties of GaN layers on Si(001) grown by plasma-assisted molecular-beam epitaxy
    • B. Yang, A. Trampert, O. Brandt, B. Jenichen, and K.H. Ploog: Structural properties of GaN layers on Si(001) grown by plasma-assisted molecular-beam epitaxy. J. Appl. Phys. 83, 3800 (1998).
    • (1998) J. Appl. Phys , vol.83 , pp. 3800
    • Yang, B.1    Trampert, A.2    Brandt, O.3    Jenichen, B.4    Ploog, K.H.5
  • 23
    • 0029746610 scopus 로고    scopus 로고
    • T.D. Moustakas: Epitaxial growth of GaN films produced by ECR-assisted MBE, in Gallium Nitride and Related Materials, edited by F.A. Ponce, R.D. Dupuis, S. Nakamura, and J.A. Edmond (Mater. Res. Soc. Symp. Proc. 395, Pittsburgh, PA, 1996), p. 111.
    • T.D. Moustakas: Epitaxial growth of GaN films produced by ECR-assisted MBE, in Gallium Nitride and Related Materials, edited by F.A. Ponce, R.D. Dupuis, S. Nakamura, and J.A. Edmond (Mater. Res. Soc. Symp. Proc. 395, Pittsburgh, PA, 1996), p. 111.
  • 24
    • 34748864516 scopus 로고    scopus 로고
    • Optical characteristics of GaN epilayer grown on silicon substrate by Raman and PL spectroscopy
    • S.S. Ng, Z. Hassan, and H. Abu Hassan: Optical characteristics of GaN epilayer grown on silicon substrate by Raman and PL spectroscopy. J. Solid State Sci. Technol. Lett. 12(Suppl.), 75 (2005).
    • (2005) J. Solid State Sci. Technol. Lett , vol.12 , Issue.SUPPL. , pp. 75
    • Ng, S.S.1    Hassan, Z.2    Abu Hassan, H.3
  • 25
    • 0002849654 scopus 로고    scopus 로고
    • GaN grown on Si(111) substrate: From two-dimensional growth to quantum well assessment
    • F. Semond, B. Damilano, S. Vezian, N. Grandjean, M. Leroux, and J. Massies: GaN grown on Si(111) substrate: From two-dimensional growth to quantum well assessment. Appl. Phys. 75, 82 (1999).
    • (1999) Appl. Phys , vol.75 , pp. 82
    • Semond, F.1    Damilano, B.2    Vezian, S.3    Grandjean, N.4    Leroux, M.5    Massies, J.6
  • 26
    • 0029637531 scopus 로고    scopus 로고
    • High dislocation densities in high efficiency GaN-based light-emitting diodes
    • S.D. Lester, F.A. Ponce, M.G. Craford, and D.A. Steigerwald: High dislocation densities in high efficiency GaN-based light-emitting diodes. Appl. Phys. Lett. 66, 1249 (1999).
    • (1999) Appl. Phys. Lett , vol.66 , pp. 1249
    • Lester, S.D.1    Ponce, F.A.2    Craford, M.G.3    Steigerwald, D.A.4
  • 28
    • 21544443185 scopus 로고
    • Raman scattering from LO phonon-plasmon coupled modes in gallium nitride
    • T. Kozawa, T. Kachi, H. Kano, Y. Taga, and M. Hashimoto: Raman scattering from LO phonon-plasmon coupled modes in gallium nitride. J. Appl. Phys. 75, 1098 (1994).
    • (1994) J. Appl. Phys , vol.75 , pp. 1098
    • Kozawa, T.1    Kachi, T.2    Kano, H.3    Taga, Y.4    Hashimoto, M.5
  • 29
    • 0000798554 scopus 로고    scopus 로고
    • Impurity-induced modes Mg, As, Si, and C in heagonal and cubic GaN
    • G. Kaczmarczyk, A. Kaschner, A. Hoffman, and C. Thomsen: Impurity-induced modes Mg, As, Si, and C in heagonal and cubic GaN. Phys. Rev. B 61, 5353 (2000).
    • (2000) Phys. Rev. B , vol.61 , pp. 5353
    • Kaczmarczyk, G.1    Kaschner, A.2    Hoffman, A.3    Thomsen, C.4
  • 33
    • 0030398934 scopus 로고    scopus 로고
    • J.M. Myoung, C. Kim, K.H. Shim, O. Gluschenkov, K. Kim, and M.C. Yoo: High-quality p-type GaN films grown by plasma-assisted molecular-beam epitaxy, in III-Nitride, SiC and Diamond Materials for Electronic Devices, edited by D.K. Gaskill, C.D. Brandt, and R.J. Nemanich (Mater. Res. Soc. Symp. Proc. 423, Pittsburgh, PA, 1996), p. 385.
    • J.M. Myoung, C. Kim, K.H. Shim, O. Gluschenkov, K. Kim, and M.C. Yoo: High-quality p-type GaN films grown by plasma-assisted molecular-beam epitaxy, in III-Nitride, SiC and Diamond Materials for Electronic Devices, edited by D.K. Gaskill, C.D. Brandt, and R.J. Nemanich (Mater. Res. Soc. Symp. Proc. 423, Pittsburgh, PA, 1996), p. 385.
  • 34
    • 24244444170 scopus 로고
    • Absence of diffusion in certain random lattices
    • P.W. Anderson: Absence of diffusion in certain random lattices. Phys. Rev. 109, 1492 (1958).
    • (1958) Phys. Rev , vol.109 , pp. 1492
    • Anderson, P.W.1
  • 37
    • 26744445785 scopus 로고
    • Infrared absorption at longitudinal optic frequency in cubic crystal films
    • D.W. Berreman: Infrared absorption at longitudinal optic frequency in cubic crystal films. Phys. Rev. 130, 2193 (1963).
    • (1963) Phys. Rev , vol.130 , pp. 2193
    • Berreman, D.W.1
  • 38
    • 21544443185 scopus 로고
    • Raman scattering from LO phonon-plasmon coupled modes in gallium nitride
    • T. Kozawa, T. Kachi, H. Kano, Y. Taga, and M. Hashimoto: Raman scattering from LO phonon-plasmon coupled modes in gallium nitride. J. Appl. Phys. 75, 1098 (1994).
    • (1994) J. Appl. Phys , vol.75 , pp. 1098
    • Kozawa, T.1    Kachi, T.2    Kano, H.3    Taga, Y.4    Hashimoto, M.5
  • 41
    • 0031200689 scopus 로고    scopus 로고
    • Polarized reflectance spectroscopy and spectroscopic ellipsometry determination of the optical anisotropy of gallium nitride on sapphire
    • G. Yu, H. Ishikawa, T. Egawa, T. Soga, J. Watanabe, T. Jimbo, and M. Umeno: Polarized reflectance spectroscopy and spectroscopic ellipsometry determination of the optical anisotropy of gallium nitride on sapphire. Jpn. J. Appl. Phys. 36, L1029 (2007).
    • (2007) Jpn. J. Appl. Phys , vol.36
    • Yu, G.1    Ishikawa, H.2    Egawa, T.3    Soga, T.4    Watanabe, J.5    Jimbo, T.6    Umeno, M.7


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