The design and experiment of ion generator power supply for vacuum sputtering

Fourth Power Conversion Conference-NAGOYA, PCC-NAGOYA 2007 - Conference Proceedings

Volumn , Issue , 2007, Pages 931-935

  Chen, Wen Guang ^a   Rao, Yi Hua ^a   Shan, Chang Hong ^a   Fujita, Goro ^b   Yasutoshi, Takemoto ^b  

^a UNIVERSITY OF SOUTH CHINA   (China)

^b SHIBAURA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Ion assistant sputtering; Phase shift PWM; Resonant inverter; Soft switching

Indexed keywords

ELECTRIC LOADS; ELECTRIC NETWORK ANALYSIS; ELECTRIC POWER DISTRIBUTION; RAPID PROTOTYPING; SPUTTERING; VACUUM;

ION ASSISTANT SPUTTERING; PHASE-SHIFT PWM; RESONANT INVERTERS; SOFT SWITCHING;

ELECTRIC INVERTERS;

EID: 34748892344     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PCCON.2007.373078     Document Type: Conference Paper

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