Sure methods of on-wafer scattering parameter measurements with self-calibration procedures

47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996

Volumn , Issue , 1996, Pages 136-145

  Heuermann, Holger ^a  

^a Rosenberger HF Technik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

SCATTERING PARAMETERS;

CALIBRATION STANDARD; MEASUREMENT PROBLEMS; NETWORK ANALYZER CALIBRATION; NETWORK ANALYZER MEASUREMENT; ON-WAFER MEASUREMENTS; SCATTERING PARAMETER MEASUREMENT; SELF-CALIBRATION METHOD; SELF-CALIBRATION PROCEDURES;

CALIBRATION;

EID: 34648876188     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTG.1996.327174     Document Type: Conference Paper

References (7)

1. ENGEN, G.F., HOER, C.A., Thru-Reflect-Line: An Improved Technique for Calibrating the Dual Six Port Automatic Network Analyzer, IEEE Trans. Microw. Theo. Techn., MTT-27, Dec. 1979, pp. 987-993
2. EUL, H.J., SCHIEK, B., A Generalized Theory and New Calibration Procedures for Network Analyzer Self-Calibration, IEEE Trans. Microw. Theo. Techn., MTT-39, March 1991, pp. 724-731
3. SPECIALE, R.A., A Generalization of the TSD Network-Analyzer Calibration Procedure, Covering n-Port Scattering-Parameter Measurements, Affected by Leakage Errors, IEEE Trans, on Microw. Theory and Techn., MTT-25, Dec. 1977, pp. 1100-1115
4. BUTLER, J.V., RYTTING, D.K., ISKANDER, M.F., POLLARD, R.D. VAN DEN BOSSCHE, M., 16-Term Error Model and Calibration Procedure for On-Wafer Network Analysis Measurements, IEEE Trans. Microw. Theo. Techn., MTT-39, Dec. 1991, pp. 2211-2217
5. VAN HAMME, H., VAN DEN BOSSCHE, M., Flexible Vector Network Analyzer Calibration with Accuracy Bounds Using an 8-Term or a 16-Term Error Correction Model, IEEE Trans. Instrum. Meas., MTT-42, Jun. 1994, pp. 976-987
6. HEUERMANM, H., SCHIEK, B., Results of Network Analyzer Measurements with Leakage Errors Corrected with the TMS-15-Term Procedure, Proceedings of the IEEE MTT-S International Microwawe Symposium, San Diego, 1994, pp. 1361-1364
7. HEWLETT PACKARD, On-Wafer measurements using the HP 8510 Network Analyzer and Cascade Micro-tech Wafer Probes, Product Note 8510-6, May 1986