Moire interferometric alignment and overlay techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2196, Issue , 1994, Pages 371-382

  Zaidi, Saleem H ^a   Frauenglass, A ^a   Brueck, S R J ^a  

^a UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; DIFFRACTION GRATINGS; INTEGRATED CIRCUITS;

DOUBLE PERIOD; LATENT IMAGES; MEASUREMENT TECHNIQUES; OVERLAY TECHNIQUES; PITCH GRATING; POSITIONING SYSTEM;

PROCESS CONTROL;

EID: 34648818089     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.174139     Document Type: Conference Paper

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