Effect of overlayers on critical-point parameters in the analysis of ellipsometric spectra

Applied Physics Letters

Volumn 91, Issue 12, 2007, Pages

  Jung, Y W ^a   Ghong, T H ^a   Kim, Y D ^a   Aspnes, D E ^b  

^a Kyung Hee University   (South Korea)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CADMIUM COMPOUNDS; DATA REDUCTION; PARAMETER ESTIMATION; SEMICONDUCTING GALLIUM ARSENIDE;

CRITICAL-POINT PARAMETERS; ELLIPSOMETRIC DATA; OVERLAYER-REMOVAL DATA;

ELLIPSOMETRY;

EID: 34648812801     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2784187     Document Type: Article

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