Secondary electron imaging of SiC-based structures in secondary electron microscope

Surface Science

Volumn 601, Issue 18, 2007, Pages 4428-4432

  Suvorova, A A ^a   Samarin, S ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Secondary electron emission; Secondary electron microscopy; Semiconductor heterostructures; Silicon carbide

Indexed keywords

ELECTRON EMISSION; ELECTRON MICROSCOPES; HETEROJUNCTIONS; LATTICE MISMATCH; OPTIMIZATION; SURFACE TOPOGRAPHY;

CHEMICAL CONSTITUENTS; SECONDARY ELECTRON IMAGING;

SILICON CARBIDE;

EID: 34548625987     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.04.142     Document Type: Article

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