STW gas sensors using microplasma-polymerized films

Journal of Photopolymer Science and Technology

Volumn 20, Issue 2, 2007, Pages 251-254

  Yatsuda, Hiromi ^a   Nara, Makoto ^a   Mori, Toshimasa ^a   Terashima, Kazuo ^c   Aizawa, Hidenobu ^b   Kurosawa, Shigeru ^b  

^a JAPAN RADIO CO LTD   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c NONE

Author keywords

Ethanol; Microplasma; Plasma polymerized film; Quarts crystal microbalance; STW gas sensor; Styrene

Indexed keywords

EID: 34548623050     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.20.251     Document Type: Article

References (7)

1. S. Shiokawa, J. Kondoh, Jpn. J. Appl. Phy., 43, 5B (2004) 2799.
2. S. Kurosawa, B. Atthoff, H. Aizawa J. Hilborn, Thin Solid Films, 457 (2004) 26.
3. H. Yatsuda, M. Nara, T. Kogai, H. Aizawa, S. Kurosawa, Thin Solid Films, in press.
4. T. Ito, K. Terashima, Appl. Phys. Lett., 80 (2002) 2648.
5. T. Ito, H. Nishiyama, K. Terashima, K. Sugimoto, H. Yoshikawa, H. Takahashi, T. Sakurai, J. Phys., D 37 (2004) 445.
6. S. Kurosawa, H. Harigae, J. W. Park, H. Aizawa, H. Suzuki, K. Terashima, J. Photopolymer Sci. Technol., 18, 2 (2005) 273.
7. H. Harigai, H. Aizawa, S. Kurosawa, K. Terashima, H. Suzuki, Proc. ICRP-6/SPP-23 (2006) 335.