Honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas

Solar Energy Materials and Solar Cells

Volumn 91, Issue 19, 2007, Pages 1800-1804

  Saito, Yoji ^a   Kosuge, Takeshi ^a  

^a SEIKEI UNIVERSITY   (Japan)

Author keywords

Chlorine trifluoride gas; Multi crystalline silicon; Texturization

Indexed keywords

CHLORINE COMPOUNDS; CRYSTALLINE MATERIALS; REFLECTIVE COATINGS; SILICONES; SUBSTRATES;

CHLORINE TRIFLUORIDE GAS; MULTI-CRYSTALLINE SILICON; TEXTURIZATION;

SILICON SOLAR CELLS;

EID: 34548535240     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2007.06.009     Document Type: Article

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