Research of microactuator with PZT prepared by sol-gel

Cailiao Gongcheng/Journal of Materials Engineering

Volumn , Issue 8, 2007, Pages 24-27

  Qiu, Cheng Jun ^a,b   Liu, Hong Mei ^a   Zhang, Hui Jun ^a   Zhao, Quan Liang ^a,b   Meng, Li Na ^a   Cao, Mao Sheng ^b  

^a HEILONGJIANG UNIVERSITY   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Anisotropic etching; MEMS; Microactuator; PZT thin films; Sol gel

Indexed keywords

EID: 34548478086     PISSN: 10014381     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)