The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering

Superlattices and Microstructures

Volumn 42, Issue 1-6, 2007, Pages 265-269

  Rolo, A G ^a   Ayres de Campos, J ^a   Viseu, T ^a   de Lacerda Aroso T ^a   Cerqueira, M F ^a  

^a UNIVERSITY OF MINHO   (Portugal)

Author keywords

Raman; Stress; Thin films; X ray; ZnO

Indexed keywords

ANNEALING; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PARAMETER ESTIMATION; RAMAN SPECTROSCOPY; STRESS ANALYSIS; STRUCTURAL PROPERTIES; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

GROWTH PARAMETERS;

THIN FILMS;

EID: 34548475581     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2007.04.069     Document Type: Article

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