Microtribological analysis of gold and copper contacts

Tribology International

Volumn 40, Issue 10-12 SPEC. ISS., 2007, Pages 1526-1530

  Barriga, J ^a   Fernandez Diaz B ^a   Juarros, A ^a   Ahmed, S I U ^b   Arana, J L ^c  

^a IK4 TEKNIKER   (Spain)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF THE BASQUE COUNTRY UPV EHU   (Spain)

Author keywords

Capillary forces; Copper; Gold; Microtribology

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; ELECTRIC CONNECTORS; ELECTRIC SWITCHES; MEMS; MICROPROCESSOR CHIPS; TRIBOLOGY;

CAPILLARY FORCES; FRICTIONAL PROPERTIES; MICROTRIBOLOGY;

GOLD;

EID: 34548213789     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.triboint.2007.01.009     Document Type: Article

References (10)

1. Hsu T-R, Materials for MEMS and microsystems, MEMS and microsystems: design and manufacture. McGraw-Hill, 2002, [Chapter 7] ISBN: 007-239391-2.
2. Patton S.T., and Zabinski J.S. Fundamental studies of Au contacts in MEMS RF swtches. Tribol Lett 18 12 (2005)
3. Holmberg K, Matthews A. Coatings tribology. ISBN: 0-444-888870-51994. Elsevier Science; 1994. p. 155-71.
4. Brown C., Krim J., and Morris A. Analysis of cycle lifetimes and failure modes for RF MEMS switches, WTC2005-63733 (2005), World Tribology Congress, Washington
5. Zhuang Y.X., and Menon K. Capillary induced stiction and adhesion of MEMS materials, WTC2005-63203 (2005), World Tribology Congress, Washington
6. Borruto A., Crivellone G., and Marani F. Influence of surface wettability on friction and wear tests. Wear 222 (1998) 57-65
7. Perry S.S., Laboriante I., and Yan X. Vapor phase lubrication of gold/gold interfaces, WTC2005-63773 (2005), World Tribology Congress, Washington
8. Kiely J.D., Houston J.E., Mulder J.A., Hsung R.P., and Zhu X.Y. Adhesion, deformation and friction for self assembled monolayers on Au and Si surfaces. Tribol Lett 7 2-3 (1999) 103-107
9. Ashcroft NW, Mermin ND. Solid state physics. Ed: Harcourt, 1976. ISBN: 0-03-083993-9.
10. Owens D.K., and Wendt R.C. Estimation of the surface energy of polymers. J Appl Polym Sci 13 (1969) 1741-1747