Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL

Microsystem Technologies

Volumn 13, Issue 8-10, 2007, Pages 1289-1295

  Yoon, Yong Joong ^a   Choi, Hyun ^a   Kim, Wan Chin ^a   Song, Taesun ^a   Park, No Cheol ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; NUMERICAL METHODS; THICKNESS MEASUREMENT;

NUMERICAL APERTURE; SOLID IMMERSION LENS (SIL); SURFACE NEAR-FIELD RECORDING; THICKNESS TOLERANCE;

LENSES;

EID: 34548208133     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0353-2     Document Type: Conference Paper

References (8)

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