Ferroelectric poly(vinylidene fluoride-hexafluoropropylene) thin films on silicon substrates

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 158-161

  He, Xujiang ^a   Yao, Kui ^a   Gan, Bee Keen ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

Ferroelectric polymer; Micro electromechanical systems; Piezoelectric; PVDF; Thin film

Indexed keywords

ALUMINUM; DRYING; FERROELECTRIC FILMS; FILM PREPARATION; INORGANIC COATINGS; MEMS; POLYMER FILMS; SILICON;

FERROELECTRIC POLYMERS; SOLUTION COATINGS;

THIN FILMS;

EID: 34548184994     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.02.023     Document Type: Article

References (9)

1. Tashiro K., and Kepler R.G. In: Nalwa H.S. (Ed). Ferroelectric Polymers: Chemistry, Physics, and Applications (1995), Marcel Dekker, New York Chapter 2-3
2. Lu X., Schirokauer A., and Scheinbeim J.I. Giant electrostrictive response in poly(vinylidene fluoride-hexafluoropropylene) copolymers. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 47 (2000) 1291-1295
3. He X.J., Yao K., and Gan B.K. Phase transition and properties of a ferroelectric poly(vinylidene fluoride-hexafluoropropylene) copolymer. J. Appl. Phys. 97 (2005) 084101
4. Yao K., and Tay F.E.H. Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 50 (2003) 113-116
5. Gregorio Jr. R., and Cestari M. Effect of crystallization temperature on the crystalline phase content and morphology of poly(vinylidene fluoride). J. Polym. Sci. B: Polym. Phys. 32 (1994) 859-870
6. Grubb D.T., and Choi K.W. The annealing of solution grown crystals of alpha and gamma poly(vinylidene fluoride). J. Appl. Phys. 52 (1981) 5908-5915
7. Benz M., Euler M.B., and Gregory O.J. The role of solution phase water on the deposition of thin films of poly(vinylidene fluoride). Macromolecules 35 (2002) 2682-2688
8. Salimi A., and Yousefi A.A. Conformational changes and phase transformation mechanisms in PVDF solution-cast films. J. Polym. Sci. B: Polym. Phys. 42 (2004) 3487-3495
9. Kepler R.G., and Anderson R.A. Ferroelectricity in polyvinylidene fluoride. J. Appl. Phys. 49 (1978) 1232-1235