Mesoscopic mechanical characterization of hydrogenated silicon thin film and the intrinsic relationship with the microstructure

Wuli Xuebao/Acta Physica Sinica

Volumn 56, Issue 8, 2007, Pages 4834-4840

  Wang, Quan ^a   Ding, Jian Ning ^a   He, Yu Liang ^a,b   Xue, Wei ^c   Fan, Zhen ^a  

^a JIANGSU UNIVERSITY   (China)

^b NANJING UNIVERSITY   (China)

^c WENZHOU UNIVERSITY   (China)

Author keywords

Crystalline volume fraction; Elastic modulus; Hydrogenated silicon film; Raman spectra

Indexed keywords

EID: 34548157239     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)