Fabrication of a complicated heat transfer MicroChannel system for CPU cooling study

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 654-658

  Chen, H T ^a   Liu, C W ^b,e   Liu, S G ^c   Yang, C S ^d   Gau, C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c DEPARTMENT OF ELECTRONIC ENGINEERING   (Taiwan)

^d FAR EAST UNIVERSITY   (Taiwan)

^e NationaI Nano Device Lab   (Taiwan)

Author keywords

MEMS fabrication; Micro scale heat transfer; Microchannel; Microfluidics

Indexed keywords

COOLING SYSTEMS; HEAT TRANSFER; MEMS; POLYMETHYL METHACRYLATES; PROGRAM PROCESSORS; SENSOR ARRAYS; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY; THERMAL INSULATION;

MICRO SCALE HEAT TRANSFER; MICROCHANNEL SYSTEMS; TEMPERATURE SENSOR ARRAYS;

MICROCHANNELS;

EID: 34548135221     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352104     Document Type: Conference Paper

References (9)

1. Choondal B. S., and Suresh, V. G., "A comparative analysis of studies on heat transfer and fluid flow in microchannels," Proceedings of the Micro-Scale Heat Transfer Conference, Alberta, Canada, 2000, pp. 80-92
2. Linan Jiang, Man Wong, Zohar Yitshak, "Phase change in microchannel heat sinks with integrated temperature sensors." Journal of MEMS 8(4), 1999, pp. 358-365.
3. S. Wu, J. Mai, Y. Zohar, Y. C. Tai, C. M. Ho, "A suspended microchannel with integrated temperature sensors for high-pressure flow studies." In Proceedings, The Eleventh Annual International Workshop on MEMS 98, 1998, pp. 87-92.
4. H. R. Chen, C. Gau, B. T. Dai, M. S. Tsai, "Fabrication of a micro-flow heat transfer channel integrated with array of micro temperature and pressure sensors," Proceedings of the Pacific Rim Workshop on Transducer and Micro/Nano Technologies, Xiamen, China, pp. 689-692.
5. H. R. Chen, C. Gau, B. T. Dai, M. S. Tsai, "A Monolithic Fabrication Process for a Micro-Flow Heat Transfer Channel Suspended over an Air Layer with Arrays of Micro Sensors and Heaters." Sens. Actuators A 108/1-3, 2003, pp. 81-85.
6. th Symposium on Nano Device Technology, Hsinchu, Taiwan, 14-15 May, 2003.
7. C. W. Liu, C. Gau, B. T. Dai, "Design and Fabrication Development of a Micro Flow Heated Channel with Measurements of the inside Micro-Scale Flow and Heat Transfer Process." Biosensors and Bioelectronics, 20(1), 2004, pp. 91-101.
8. R. J Moffat, "Describing the Uncertainties in Experimental Results." Experimental Thermal and Fluid Science, vol. 1, pp. 3-17, 1988.
9. C. Gau, T. M. Huang and W. Aung, "Flow and mixed convection heat transfer in a divergent heated vertical channel," ASME Journal of Heat Transfer, Vol. 118, No. 3, 1996, pp. 606-615.