Rapid fabrication of CNT sensors using electro-chemical deposition of functionalized CNTs

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 507-510

  Chow, Winnie W Y ^a   Wong, Man Keung ^a   Li, Wen J ^a,b   Wong, Ka Wai ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b SHENYANG INSTITUTE OF AUTOMATION   (China)

Author keywords

Carbon nanotubes; Electro chemical deposition

Indexed keywords

CARBOXYLIC ACIDS; ELECTROCHEMISTRY; GOLD; NANOSENSORS; PHOTOLITHOGRAPHY;

ELECTROCHEMICAL DEPOSITION; MICROELECTRODE ARRAYS; PHOTOLITHOGRAPHY PROCESS;

CARBON NANOTUBES;

EID: 34548126893     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352068     Document Type: Conference Paper

References (10)

1. S. Iijima, "Helical microtubules of graphitic carbon", Nature, vol. 354, pp. 56-58, 1991
2. C. K. M. Fung, V. T. S. Wong, R. H. M. Chan, and W. J. Li, "Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors", IEEE Trans. on Nanotechnology, vol. 3, no. 3, pp. 395, September 2004
3. C. K. M. Fung, M. Q. H. Zhang, Z. Dong, and W. J. Li, "Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly", Proc. IEEE NANO 2005, vol. 1, pp. 199-202, 2002
4. J. Kong et al., "Nanotube molecular wires as chemical sensors", Science, 287, pp.622-625, 2000
5. B. Q. Wei et al., "Organized assembly of carbon nanotubes", Nature, vol. 416, pp.495-496, 2002
6. W. B. Choi et al., "Electrophoresis deposition of carbon nanotubes for triode-type field emission display", App. Phys. Lett., vol. 78, no. 11, pp. 1547-1549, March 2001
7. B. Gao et al., "Fabrication and electron field emission properties of carbon nanotube films by electrophoretic deposition", Advanced Materials, vol. 13, no. 23, pp. 1770-1773, December 2001
8. A. Jorio et al., "Characterizing carbon nanotube samples with resonance Raman scattering", New Journal of Physics 5, pp. 139.1-139.7, 2003
9. M. L. Y. Sin et al., "Chemically functionlized multi-walled carbon nanotube sensors for ultra-low-power alcohol vapor detection", Proc. IEEE NANO 2006, vol. 2, pp. 461-464, 2006
10. C. K. M. Fung and W. J. Li, "Ultra-low-power polymer thin film encapsulated carbon nanotube thermal sensors", Proc. IEEE NANO 2004, pp. 158-160, 2004