Miniaturization of electrostatic fluid accelerators

Journal of Microelectromechanical Systems

Volumn 16, Issue 4, 2007, Pages 809-815

  Hsu, Chih Peng ^a   Jewell Larsen, Nels E ^a   Krichtafovitch, Igor A ^b   Montgomery, Stephen W ^c   Dibene II, Joseph T ^c   Mamishev, Alexander A ^a  

^a University of Washington   (United States)

^b Kronos Advanced Technologies Inc   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Electrohydrodynamic (EHD); Electrostatic fluid accelerators (EFAs)

Indexed keywords

COOLING; ELECTROHYDRODYNAMICS; ELECTROSTATICS; FORCED CONVECTION; MEMS; REACTIVE ION ETCHING; TEMPERATURE; TEMPERATURE CONTROL;

ELECTROSTATIC FLUID ACCELERATORS (EFAS); IONIC WIND PUMPS;

ELECTROSTATIC ACCELERATORS;

EID: 34548048615     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.899336     Document Type: Article

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