MEMS equipment and materials markets and opportunities

2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings

Volumn 3, Issue , 2007, Pages 241-243

  Sheet, Lubab L ^a  

^a SEMI   (United States)

Author keywords

MEMS; MEMS equipment; MEMS materials; MEMS CMOS integration; Microsystems MST

Indexed keywords

AUTOMOBILES; CMOS INTEGRATED CIRCUITS; CONSUMER ELECTRONICS; ELECTRONIC EQUIPMENT MANUFACTURE; MICROSYSTEMS;

MEMS MATERIALS; MEMS-CMOS INTEGRATION; MICROSYSTEM INDUSTRY;

MEMS;

EID: 34547983246     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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