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Volumn 46, Issue 1, 2007, Pages 71-75

Growth and energy bandgap formation of silicon nitride films in radical nitridation

Author keywords

Energy bandgap; Radical nitridation; Scanning tunneling microscopy; Scanning tunneling spectroscopy; Silicon nitride

Indexed keywords

ENERGY GAP; FILM GROWTH; NITRIDATION; SCANNING TUNNELING MICROSCOPY; SILICON NITRIDE;

ENERGY BANDGAP; RADICAL NITRIDATION; RADIO FREQUENCY (RF); SCANNING TUNNELING SPECTROSCOPY;

THIN FILMS;

EID: 34547909978 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.71 Document Type: Article

Times cited : (6)

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