Fundamental study on one-dimensional-array medical ultrasound probe with piezoelectric polycrystalline film by hydrothermal method: Experimental fabrication of one-dimensional-array ultrasound probe

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 7 B, 2007, Pages 4779-4783

  Endo, Akito ^a   Kawashima, Norimichi ^a   Takeuchi, Shinichi ^a   Ishikawa, Mutsuo ^b   Kurosawa, Minoru Kuribayashi ^b  

^a TOIN UNIVERSITY OF YOKOHAMA   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Hydrothermal method; Phased array technique; Photolithography; PZT polycrystalline film; Ultrasound probe

Indexed keywords

HYDROXYAPATITE; LEAD COMPOUNDS; PHOTOLITHOGRAPHY; POLYCRYSTALLINE MATERIALS; TRANSDUCERS; ULTRASONIC DEVICES;

HYDROTHERMAL METHOD; PHASED-ARRAY TECHNIQUE; PZT POLYCRYSTALLINE FILMS; ULTRASOUND PROBES;

THIN FILMS;

EID: 34547893047     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.4779     Document Type: Article

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