X-ray topography analysis of bulk acoustic wave resonators

Bulletin of the Russian Academy of Sciences: Physics

Volumn 71, Issue 1, 2007, Pages 72-75

  Irzhak, D V ^a   Roshchupkin, D V ^a   Punegov, D V ^a   Sakharov, S A ^b  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b FOMOS Materials Co   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; CRYSTAL RESONATORS; HARMONIC ANALYSIS; TOPOGRAPHY; X RAY ANALYSIS; X RAY DIFFRACTION ANALYSIS;

ACOUSTIC OSCILLATIONS; ACOUSTIC WAVE RESONATORS; AMPLITUDE-FREQUENCY RESPONSE (AFR);

ACOUSTIC WAVES;

EID: 34547798016     PISSN: 10628738     EISSN: None     Source Type: Journal    
DOI: 10.3103/S1062873807010182     Document Type: Conference Paper

References (8)

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8. Roshchupkin, D.V., Roshchupkina, H.D., and Irzhak, D.V., X-ray Topography Analysis of Acoustic Wave Fields in the SAW-Resonator Structures, IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control, 2005, vol. 52, p. 2081.