Simulation metamodel development using uniform design and neural networks for automated material handling systems in semiconductor wafer fabrication

Simulation Modelling Practice and Theory

Volumn 15, Issue 8, 2007, Pages 1002-1015

  Kuo, Yiyo ^a   Yang, Taho ^b   Peters, Brett A ^c   Chang, Ihui ^d  

^a HSING KUO UNIVERSITY OF MANAGEMENT   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c Texas AandM University   (United States)

^d TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

Neural network; Semiconductor manufacturing; Simulation metamodel; Uniform design

Indexed keywords

MATERIALS HANDLING; METADATA; NEURAL NETWORKS; PROBLEM SOLVING; SILICON WAFERS;

AVERAGE PREDICTION ERRORS; SEMICONDUCTOR MANUFACTURING; SIMULATION METAMODELS; UNIFORM DESIGN;

COMPUTER SIMULATION;

EID: 34547778459     PISSN: 1569190X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.simpat.2007.05.006     Document Type: Article

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