메뉴 건너뛰기




Volumn 28, Issue 8, 2007, Pages 731-733

Border-trap characterization in high-κ strained-Si MOSFETs

Author keywords

1 f noise; Border traps; Charge pumping; Hysteresis; Interface trapping; Strained Si

Indexed keywords

DRAIN CURRENT; GATE DIELECTRICS; HYSTERESIS; SEMICONDUCTING SILICON;

EID: 34547751876     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2007.902086     Document Type: Article
Times cited : (12)

References (17)
  • 2
    • 0347968053 scopus 로고    scopus 로고
    • 2 gate stack with TaN gate electrode
    • Jan
    • 2 gate stack with TaN gate electrode," IEEE Electron Device Lett., vol. 25, no. 1, pp. 13-15, Jan. 2004.
    • (2004) IEEE Electron Device Lett , vol.25 , Issue.1 , pp. 13-15
    • Lee, S.1    Kwong, D.L.2
  • 5
    • 23844459561 scopus 로고    scopus 로고
    • Recent progress in mobility-enhancement technology
    • May
    • C. W. Liu, S. Maikap, and C. Y. Yu, "Recent progress in mobility-enhancement technology," IEEE Circuit Devices Mag., vol. 21, no. 3, pp. 21-36, May 2005.
    • (2005) IEEE Circuit Devices Mag , vol.21 , Issue.3 , pp. 21-36
    • Liu, C.W.1    Maikap, S.2    Yu, C.Y.3
  • 7
    • 0026853994 scopus 로고
    • Border traps in MOS devices
    • Apr
    • D. M. Fleetwood, "Border traps in MOS devices," IEEE Trans. Nucl. Sci., vol. 39, no. 2, pp. 269-271, Apr. 1992.
    • (1992) IEEE Trans. Nucl. Sci , vol.39 , Issue.2 , pp. 269-271
    • Fleetwood, D.M.1
  • 9
    • 33646078317 scopus 로고    scopus 로고
    • Characterization of mixed-signal properties of MOSFETs with high-κ (SiON/HfSiON/TaN) gate stacks
    • May
    • Z. M. Rittersma, M. Vertregt, W. Deweerd, S. V. Elshocht, P. Srinivasan, and E. Simoen, "Characterization of mixed-signal properties of MOSFETs with high-κ (SiON/HfSiON/TaN) gate stacks," IEEE Trans. Electron Devices, vol. 53, no. 5, pp. 1216-1225, May 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.5 , pp. 1216-1225
    • Rittersma, Z.M.1    Vertregt, M.2    Deweerd, W.3    Elshocht, S.V.4    Srinivasan, P.5    Simoen, E.6
  • 10
    • 19944381220 scopus 로고    scopus 로고
    • Impact of high-κ gate material with metal gates on LF noise in n and p-MOSFETs
    • Jun
    • P. Srinivasan, E. Simoen, L. Pantisano, C. Claeys, and D. Misra, "Impact of high-κ gate material with metal gates on LF noise in n and p-MOSFETs," Microelectron. Eng., vol. 80, no. 1, pp. 226-229, Jun. 2005.
    • (2005) Microelectron. Eng , vol.80 , Issue.1 , pp. 226-229
    • Srinivasan, P.1    Simoen, E.2    Pantisano, L.3    Claeys, C.4    Misra, D.5
  • 11
    • 0037818424 scopus 로고    scopus 로고
    • A new method to characterize border traps in sub-micron transistors using hysteresis in the drain current
    • Apr
    • K. N. Manjula Rani, V. Ramgopal Rao, and J. Vasi, "A new method to characterize border traps in sub-micron transistors using hysteresis in the drain current," IEEE Trans. Electron Devices, vol. 50, no. 4, pp. 973-979, Apr. 2003.
    • (2003) IEEE Trans. Electron Devices , vol.50 , Issue.4 , pp. 973-979
    • Manjula Rani, K.N.1    Ramgopal Rao, V.2    Vasi, J.3
  • 12
    • 5044252616 scopus 로고    scopus 로고
    • Ge out-diffusion effect on flicker noise in strained-Si n-MOSFETs
    • Oct
    • W.-C. Hua, M. H. Lee, P. S. Chen, S. Maikap, C.W. Liu, and K. M. Chen, "Ge out-diffusion effect on flicker noise in strained-Si n-MOSFETs," IEEE Electron Device Lett., vol. 25, no. 10, pp. 693-695, Oct. 2004.
    • (2004) IEEE Electron Device Lett , vol.25 , Issue.10 , pp. 693-695
    • Hua, W.-C.1    Lee, M.H.2    Chen, P.S.3    Maikap, S.4    Liu, C.W.5    Chen, K.M.6
  • 14
    • 0742321656 scopus 로고    scopus 로고
    • Mobility measurement and degradation mechanisms of MOSFETs made with ultrathin high-κ dielectrics
    • Jan
    • W. Zhu, J.-P. Han, and T. P. Ma, "Mobility measurement and degradation mechanisms of MOSFETs made with ultrathin high-κ dielectrics," IEEE Trans. Electron Devices, vol. 51, no. 1, pp. 98-105, Jan. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.1 , pp. 98-105
    • Zhu, W.1    Han, J.-P.2    Ma, T.P.3
  • 16
    • 26444520423 scopus 로고    scopus 로고
    • Threading dislocation induced low frequency noise in strained-Si nMOSFETs
    • Sep
    • W.-C. Hua, M. H. Lee, P. S. Chen, M.-J. Tsai, and C. W. Liu, "Threading dislocation induced low frequency noise in strained-Si nMOSFETs," IEEE Electron Device Lett., vol. 26, no. 9, pp. 667-669, Sep. 2005.
    • (2005) IEEE Electron Device Lett , vol.26 , Issue.9 , pp. 667-669
    • Hua, W.-C.1    Lee, M.H.2    Chen, P.S.3    Tsai, M.-J.4    Liu, C.W.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.