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Volumn 39, Issue 8, 2007, Pages 665-673
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Quantitative surface analysis of Fe-Ni alloy films by XPS, AES and SIMS
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Author keywords
C60 sims; Fe Ni alloy; ICP MS; Isotope dilution method; Surface quantification
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
ISOTOPES;
SECONDARY ION MASS SPECTROMETRY;
SILICON WAFERS;
SURFACE ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ALLOY FILMS;
CONSULTATIVE COMMITTEE FOR AMOUNT OF SUBSTANCE (CCQM);
ISOTOPE DILUTION METHODS;
SURFACE QUANTIFICATION;
IRON ALLOYS;
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EID: 34547676160
PISSN: 01422421
EISSN: 10969918
Source Type: Journal
DOI: 10.1002/sia.2575 Document Type: Article |
Times cited : (31)
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References (25)
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