Properties of sn02 polycrystalline thin films prepared by magnetic reactive sputtering

Bandaoti Guangdian/Semiconductor Optoelectronics

Volumn 28, Issue 3, 2007, Pages

  Yao, Fei Fei ^a   Feng, Liang Huan ^a   Chen, Wei Dong ^a   Lei, Zhi ^a   Zhang, Jing Quan ^a   Li, Wei ^a   Wu, Li Li ^a   Cai, Wei ^a   Cai, Ya Ping ^a   Zheng, Jia Gui ^a   Li, Bing ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

Magnetic reactive sputtering; SnO2; Transparent high resistant film

Indexed keywords

EID: 34547641939     PISSN: 10015868     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)