Analysis on the offset error of cross-section contour by using the simulated measurement model of atomic force microscopy

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 28, Issue 1, 2007, Pages 23-33

  Lin, Zone Ching ^a   Huang, Jen Ching ^a   Zeng, Bo Jhan ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Atomic force microscopy; Constant force mode; Cross section angle; Morse potential

Indexed keywords

EID: 34547619224     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)