Size and morphology control of highly-ordered nano-silicon pillar fabricated by direct nanosphere lithography

Wuli Xuebao/Acta Physica Sinica

Volumn 56, Issue 7, 2007, Pages 4242-4246

  Li, Wei ^a   Xu, Ling ^a   Sun, Ping ^a   Zhao, Wei Ming ^a   Huang, Xin Fan ^a   Xu, Jun ^a   Chen, Kun Ji ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Nano silicon pillar; Nanosphere lithography

Indexed keywords

EID: 34547615580     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)