Intrinsic, thermal and hygroscopic residual stresses in thin gas-barrier films on polymer substrates

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7437-7441

  Dumont, P ^a   Tornare, G ^a   Leterrier, Y ^a   Manson J A E ^a  

^a LABORATOIRE DE TECHNOLOGIE DES COMPOSITES ET POLYMÈRES LTC   (Switzerland)

Author keywords

Gas barrier; Polyimide; Residual stress; SiNx

Indexed keywords

ATMOSPHERIC HUMIDITY; POLYIMIDES; RESIDUAL STRESSES; SILICON NITRIDE; THERMODYNAMIC PROPERTIES;

FILM CURVATURE; GAS BARRIER; HYGROSCOPIC PROPERTIES; THERMAL RAMPS;

THIN FILMS;

EID: 34547602477     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.104     Document Type: Article

References (16)

1. Leterrier Y., Wyser Y., and Månson J.-A.E. J. Adhes. Sci. Technol. 15 (2001) 841
2. Rochat G., Leterrier Y., Fayet P., and Månson J.-A.E. Thin Solid Films 484/1-2 (2005) 94
3. Wagner S., Gleskova H., Cheng I.-C., Sturm J.C., and Suo Z. Flexible Flat Panel Displays (2005), Wiley, New York
4. d'Heurle F.M., and Harper J.M.E. Thin Solid Films 171 (1989) 81
5. Benabdi M., and Roche A.A. J. Adhes. Sci. Technol. 11 (1997) 281
6. Townsend P.H., Barnett D.M., and Brunner T.A. J. Appl. Phys. 62 (1987) 4438
7. Masters C.B., and Salamon N.J. Int. J. Eng. Sci. 31 (1993) 915
8. Gunnars J., and Wiklund U. Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 336 (2002) 7
9. Fahnline D.E., Masters C.B., and Salamon N.J. J. Vac. Sci. Technol., A, Vac. Surf. Films 9 (1991) 2483
10. Dijken A.V., Toonder J.D., and Bouten P. Nano Indentations on Inorganic Coatings for the FlexiDis Project, Technical Report (2005), Philips Research Laboratories, Eindhoven, The Netherlands
11. Jiang M., Wood N.O., and Komanduri R. Wear 220 (1998) 59
12. Roberts A.P., Henry B.M., Sutton A.P., Grovenor C.R.M., Briggs G.A.D., Miyamoto T., Kano A., Tsukahara Y., and Yanaka M. J. Membr. Sci. 208 (2002) 75
13. Da Silva Sobrinho A.S., Czeremuszkin G., Latrèche M., and Wertheimer M.R. J. Vac. Sci. Technol., A, Vac. Surf. Films 18 (2000) 149
14. Rochat G., Leterrier Y., Garamszegi L., Månson J.-A.E., and Fayet P. Surf. Coat. Technol. 174-175 (2003) 1029
15. Rochat G., Leterrier Y., Fayet P., and Månson J.-A.E. Surf. Coat. Technol. 200 (2005) 2236
16. Murray S., Hillman G., and Pecht M. J. Electron. Packag. 126 (2004) 390