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Volumn 46, Issue 4 A, 2007, Pages 1680-1691
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Numerical study of neutral gas transport in linear plasma device
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Author keywords
Baffle plate; Monte Carlo; Neutral transport; Simulation
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Indexed keywords
ARGON;
ELECTRON TEMPERATURE;
GAS DYNAMICS;
IMPACT IONIZATION;
NUMERICAL METHODS;
ELECTRON IMPACT IONIZATION;
NEUTRAL GAS TRANSPORT;
PUMP SPEED;
PLASMA DEVICES;
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EID: 34547596625
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.46.1680 Document Type: Article |
Times cited : (19)
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References (22)
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