A 14.1 inch AMOLED display using highly stable PECVD based microcrystalline silicon TFT backplane

Digest of Technical Papers - SID International Symposium

Volumn 37, Issue 4, 2006, Pages 1947-1950

  Girotra, Kunal S ^a   Souk, JunHyung ^a   Chung, Kyuha ^a   Lim, Soonkwon ^a   Kim, Shiyul ^a   Kim, Byoung June ^a   Yang, Sung Hoon ^a   Choi, Beohmrock ^a   Goh, Joonchul ^a   Song, Young Rok ^a   Choi, Yong Mo ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; COST EFFECTIVENESS; MICROCRYSTALLINE SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILM TRANSISTORS; THIN FILMS; THRESHOLD VOLTAGE;

COST ADVANTAGES; LIFETIME TESTS; NON-LASER POLYSILICON;

ORGANIC LIGHT EMITTING DIODES (OLED);

EID: 34547591575     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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2. P. Roca i Cabarrocas, S. Kasouit, B. Kalache, R. Vanderhaghen, Y. Bonnassieux, M. Elyaakoubi, I. French. "Microcrystalline silicon: An emerging material for stable thin film transistors" Society of Information Display 2003, Volume 34, Issue 1, pp. 1096
3. T. F. Chen, C. F. Yeh, and J. C. Lou, "Investigation of grain boundary control in the drain junction on laser-crystalized poly-Si thin film transistors," IEEE Electron Device Lett., vol. 24, no. 7, pp. 457-459, Jul. 2003
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5. Czang-Ho Lee, Andrei Sazonov, and Arokia Nathan, "High-mobility nanocrystalline silicon thin-film transistors fabricated by plasma-enhanced chemical vapor deposition" Appl. Phys. Lett. 86, 222106 (2005)
6. G. Cicala, P. Capezzuto, and G.Bruno, Journal of Vacuum Science & Technology. A 19(2), Mar/April 2001.
7. P. Roca i Cabarrocas, A.F.I Morral, B. Kalache, S.Kasouit "Microcrystalline silicon thin films grown by PECVD. Growth Mechanisms and Grain Size Control, Solid State Phenomena Vol. 93 (2003) pp. 257
8. Wehrspoon, S.C. Deane, I.D. French, M.J.Powell, Thin Solid films 383, 117-121, 2001
9. A.. Saafir, Kyuha Chung et al., "A 14.1 inch WXGA solution processed OLED display with a-Si TFT", Society of Information Display 2005 Digest, pp968.