Pressure drop of laminar gas flows in a microchannel containing various pillar matrices

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1381-1386

  Vanapalli, S ^a   Ter Brake, H J M ^a   Jansen, H V ^a   Burger, J F ^a   Holland, H J ^a   Veenstra, T T ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FLOW OF GASES; MICROCHANNELS; OPTIMIZATION; PRESSURE DROP;

BOSCH DEEP REACTIVE ION ETCHING PROCESS; DENSE PILLAR MATRIX; FRICTION FACTOR CORRELATIONS; LAMINAR GAS FLOWS;

LAMINAR FLOW;

EID: 34547588708     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/021     Document Type: Article

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