Growth of carbon nanotubes with resist-assisted patterning process

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1261-1264

  Park, Kyu Chang ^a   Ryu, Je Hwang ^a   Kim, Ki Seo ^a   Yu, Yi Yin ^a   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION BARRIERS; RAMAN SPECTROSCOPY; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON EMITTER ARRAYS; LOW COST FABRICATION; RESIST ASSISTED PATTERNING PROCESS;

CARBON NANOTUBES;

EID: 34547584553     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2752513     Document Type: Article

References (11)

1. S. Iijima, Nature (London) 354, 56 (1991).
2. Y. Saito, K. Hamaguchi, R. Mizushima, U. Uemura, T. Nagasako, J. Yotani, and T. Shimojo, Appl. Surf. Sci. 146, 305 (1999).
3. K. B. K. Teo, et al., Appl. Phys. Lett. 79, 1534 (2001).
4. S. Huang, A. W. Mau, T. W. Turney, P. A. White, and L. Dai, J. Phys. Chem. B 104, 2193 (2000).
5. S. J. Oh, Y. Cheng, J. Zhang, H. Shimoda, and O. Zhou, Appl. Phys. Lett. 82, 2521 (2003).
6. C. C. Chiu, T. Y. Tsai, and N. H. Tai, Nanotechnology 17, 2840 (2006).
7. S. M. C. Viera, K. B. K. Teo, O. Groning, L. Gangloff, E. Minoux, P. Legagneux, and W. I. Milne, Appl. Phys. Lett. 89, 022111 (2006).
8. S. H. Lim, H. S. Yoon, J. H. Moon, K. C. Park, and J. Jang, Appl. Phys. Lett. 87, 243106 (2005).
9. K. C. Park, S. H. Lim, J. H. Moon, H. S. Yoon, D. Pribat, Y. Bonnassieux, and J. Jang, J. Korean Phys. Soc. 45, S833 (2004).
10. S. H. Lim, H. S. Yoon, J. H. Moon, K. C. Park, and J. Jang, Appl. Phys. Lett. 88, 033114 (2006).
11. S. H. Lim, K. C. Park, J. H. Moon, H. S. Yoon, D. Pribat, Y. Bonnassiuux, and J. Jang, Thin Solid Films 515, 1380 (2006).