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Volumn 73, Issue 4, 2007, Pages 1208-1214

Study on non-contact chuck using ultrasonic vibration (on primary cause of holding force acting to a floating object)

Author keywords

Computational fluid dynamics; Holding force; Non contact chuck; Pressure distribution; Ultrasonic vibration

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; FORCE CONTROL; NUMERICAL METHODS; PRESSURE DISTRIBUTION; VIBRATIONS (MECHANICAL);

EID: 34547437695     PISSN: 03875024     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaic.73.1208     Document Type: Article
Times cited : (5)

References (7)
  • 1
    • 0033891751 scopus 로고    scopus 로고
    • Holding characteristics of Planar objects suspended by near-field acoustic levitation
    • Matsuo, E., Koike, Y., Nakamura, K. Ueha, S. and Hashimoto, Y., Holding characteristics of Planar objects suspended by near-field acoustic levitation, Ultrasonics (2000) pp. 60-63
    • (2000) Ultrasonics , pp. 60-63
    • Matsuo, E.1    Koike, Y.2    Nakamura, K.3    Ueha, S.4    Hashimoto, Y.5
  • 2
  • 3
    • 34547423827 scopus 로고    scopus 로고
    • Yoshimoto, S. Yamazaki, T and Yagi, K., Study on non-contact chuck using ultrasonic vibration, Proc. JSPE, (2004-September) Paper No. L25, pp915-916
    • Yoshimoto, S. Yamazaki, T and Yagi, K., Study on non-contact chuck using ultrasonic vibration, Proc. JSPE, (2004-September) Paper No. L25, pp915-916
  • 4
    • 0021523665 scopus 로고    scopus 로고
    • Kuroda, S. and Hirata, N, The Characteristics of Motion of a Round Plate Supported on Squeeze Air Film, Trans. JSME, 50-459, B (1984), 2727
    • Kuroda, S. and Hirata, N, The Characteristics of Motion of a Round Plate Supported on Squeeze Air Film, Trans. JSME, 50-459, B (1984), 2727
  • 5
    • 0026839557 scopus 로고
    • Rectangular Squeezs-Film Gas Bearing Using a Poezoelectric Actuator
    • (5).Yoshimoto, S and Anno, Y., Rectangular Squeezs-Film Gas Bearing Using a Poezoelectric Actuator J. of JSPE, 58-3 (1992), 527
    • (1992) J. of JSPE , vol.58 -3 , pp. 527
    • Yoshimoto, S.1    Anno, Y.2
  • 6
    • 34547449187 scopus 로고
    • Float Characteristics of Squeeze-Film Gas Bearing with Elastic Hinges for Linear Motion Guide
    • Yoshimoto, S., Armo, Y., Sato, Y. and Hamanaka, K., Float Characteristics of Squeeze-Film Gas Bearing with Elastic Hinges for Linear Motion Guide, Trans JSME, 60-574, C(1994), 1791
    • (1994) Trans JSME , vol.60 , Issue.574 C , pp. 1791
    • Yoshimoto, S.1    Armo, Y.2    Sato, Y.3    Hamanaka, K.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.