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Volumn 73, Issue 4, 2007, Pages 1208-1214
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Study on non-contact chuck using ultrasonic vibration (on primary cause of holding force acting to a floating object)
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Author keywords
Computational fluid dynamics; Holding force; Non contact chuck; Pressure distribution; Ultrasonic vibration
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Indexed keywords
COMPUTATIONAL FLUID DYNAMICS;
FORCE CONTROL;
NUMERICAL METHODS;
PRESSURE DISTRIBUTION;
VIBRATIONS (MECHANICAL);
FLAT SURFACE;
FLOATING OBJECT;
HOLDING FORCE;
ULTRASONIC FREQUENCIES;
ULTRASONIC WAVES;
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EID: 34547437695
PISSN: 03875024
EISSN: None
Source Type: Journal
DOI: 10.1299/kikaic.73.1208 Document Type: Article |
Times cited : (5)
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References (7)
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