Improved understanding of an electron beam charge compensation method for magnetic sector secondary ion mass spectrometer analysis of insulators

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 769-774

  Zhu, Z ^a   Gu, C ^a   Stevie, F A ^a   Griffis, D P ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTION SENSITIVITY; ELECTRON BEAM CHARGE COMPENSATION; MASS RESOLUTION;

COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELECTRIC INSULATORS; ELECTRON BEAMS; SECONDARY ION MASS SPECTROMETRY;

CHARGE DISTRIBUTION;

EID: 34547381604     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2746044     Document Type: Article

References (8)

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