Photon stimulated desorption from copper and aluminum chambers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 1251-1255

  Gomez Goni J ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COPPER; DESORPTION; ELECTROPLATED PRODUCTS; GLOW DISCHARGES; SYNCHROTRON RADIATION;

ELECTROPLATED COPPER; ELECTROPLATED VACUUM CHAMBERS; PHOTON STIMULATED DESORPTION;

PHOTONS;

EID: 34547312794     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2712187     Document Type: Article

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