UV laser drilling of SiC for semiconductor device fabrication

Journal of Physics: Conference Series

Volumn 59, Issue 1, 2007, Pages 740-744

  Krüger, Olaf ^a   Schöne, Gerd ^a   Wernicke, Tim ^a   John, Wilfred ^a   Würfl, Joachim ^a   Tränkle, Günther ^a  

^a LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34547278216     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/59/1/158     Document Type: Article

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