Electrochemical formation of porous silica: Toward an understanding of the mechanisms

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 5, 2007, Pages 1250-1254

  Frey, S ^a,b   Keipert, S ^a   Chazalviel, J N ^b   Ozanam, F ^b   Carstensen, J ^a   Foll H ^a  

^a UNIVERSITY OF KIEL   (Germany)

^b LABORATOIRE DE PHYSIQUE DE LA MATIÈRE CONDENSÉE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL FORMATION; FLUORIDE ELECTROLYTES; ION DEPLETION; POROUS LAYER GROWTH;

ACIDITY; ELECTROCHEMICAL ELECTRODES; ELECTROLYTES; GROWTH KINETICS; SURFACE DIFFUSION;

POROUS SILICON;

EID: 34547236225     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200674302     Document Type: Article

References (5)

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3. S. Frey, B. Grésillon, F. Ozanam, J.-N. Chazalviel, J. Carstensen, H. Föll, and R. B. Wehrspohn, Electrochem. Solid-State Lett. 8, B25 (2005).
4. J.-N. Chazalviel, Electrochim. Acta 37, 865 (1992).
5. G. Mende, in: Semiconductor Micromachining, Vol. 2, edited by S. A. Campbell and H. J. Lewerenz (Wiley, New York, 1998), chap. 2.