A porous silicon based particle filter for microsystems

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 5, 2007, Pages 1469-1473

  Wallner, J Z ^a   Bergstrom, P L ^a  

^a Michigan Technological University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COLLECTION EFFICIENCY; INTEGRATED MICROSYSTEMS; PARTICLE FILTER; SUBMICRON RANGE;

FILTERS (FOR FLUIDS); FILTRATION; MEMBRANES; MICROSYSTEMS; MORPHOLOGY;

POROUS SILICON;

EID: 34547172803     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200674387     Document Type: Article

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