SrTiO3/BaTiO3 multilayers thin films for integrated tunable capacitors applications

Journal of the European Ceramic Society

Volumn 27, Issue 13-15, 2007, Pages 3851-3854

  Guigues, Benoit ^a,b   Guillan, Julie ^a,b   Defaÿ, Emmanuel ^a   Garrec, Pierre ^a   Wolozan, David ^a   André, Bernard ^a   Laugier, Frédéric ^a   Pantel, Roland ^b   Gagnard, Xavier ^b   Aïd, Marc ^a  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

Dielectric properties; Films; Interfaces; Perovskite; STO BTO

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; CAPACITORS; INTERFACES (MATERIALS); PERMITTIVITY; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; THIN FILMS;

ION BEAM SPUTTERING; MULTILAYER THIN FILMS; TUNABLE CAPACITORS;

MULTILAYERS;

ANNEALING; BARIUM COMPOUNDS; CAPACITORS; INTERFACES (MATERIALS); MULTILAYERS; PERMITTIVITY; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; THIN FILMS;

EID: 34347363067     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2007.02.043     Document Type: Article

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