Tailored electrochemical surface modification of semiconductors

Materials Science Forum

Volumn 512, Issue , 2006, Pages 129-136

  Schmuki, P ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

AFM; FIB; Self organization; Semiconductor; Surface patterning

Indexed keywords

AMORPHIZATION; ATOMIC FORCE MICROSCOPY; DISSOLUTION; ELECTRODEPOSITION; FOCUSED ION BEAMS; SURFACE TREATMENT;

ELECTROCHEMICAL DEPOSITION; SELF ORGANIZATION; SURFACE PATTERNING;

SEMICONDUCTOR MATERIALS;

EID: 34347353587     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-996-2.129     Document Type: Conference Paper

References (29)

1. N. V. Parthasaradhy: Practical electroplating handbook, Prentice Hall, Englewood Cliffs, NJ (1989).
2. G. O. Mallory, J. B. Hadju: Eds. Electroless Plating, Fundamentals and Applications, American Electroplaters and Surface Finishers Society (AESF), Orlando, FL, 1990.
3. R. Gasilloud, M. Hueppe, J. Michler, P. Schmuki: (in preparation).
4. P. Schmuki, L. Santinacci, T. Djenizian, and D, J. Lockwood: Phys. Stat. Sol. A, 182, 51 (2000).
5. P. Schmuki, L. E. Erickson, D. J. Lockwood, J. W. Fraser, G. Champion, H. J. Labbe: Appl. Phys. Lett, 72 (1998) 1039.
6. P. Schmuki, L. E. Erickson, D. J. Lockwood, B. F. Mason, J. W. Fraser, G. Champion, H. J. Labbe: J. Electrochem. Soc., 146 (1999) 735.
7. P. Schmuki, L. E. Erickson, D. J. Lockwood: Phys. Rev. Lett, 80 (1998) 4060.
8. P. Schmuki, L. E. Erickson: Appl. Phys.Lett. 73 (1998) 2600.
9. A. Spiegel, L. E. Erickson, P. Schmuki: J. Electrochem. Soc., 147 (2000) 2993.
10. P. Schmuki, LE. Erickson: Phys. Rev. Lett., 85 (2000) 2985.
11. L. Santinacci, T. Djenizian, P. Schmuki: J. Electrochem. Soc., 148 (2001) C640.
12. L. E. Erickson, P. Schmuki, G. Champion: J. Vac. Sci. Tech. B 18 (2000) 3918.
13. P. Schmuki, L. E. Erickson, G. Champion: J. Electrochem. Soc., 148 (2001) C177.
14. A. Spiegel, L. Staemmler, M. Döbeli, P. Schmuki: J. Electrochem. Soc., 149 (2002) C432.
15. L. Santinacci, T. Djenizian, H. Hildebrand, S. Ecoffey, H. Mokdad, T. Campanella, P.Schmuki: Electrochimica Acta, 48 (2003) 3123.
16. J. Michler, R. Gassilloud, P. Gasser, L. Santinacci, P. Schmuki: Electrochem. Solid-State Lett., 7, (2004) A41.
17. L. Santinacci, Y. Zhang and P. Schmuki: Surf. Sci, submitted 2004
18. V. Domnich, Y Gogotsi, and S. Dub: Appl. Phys. Lett. 76, 2214 (2000).
19. A. Kailer, Y. G. Gogotsi, and K. G. Nickel: Phys. Rev. B. 81, 3057 (1997).
20. V. Lehmann and H. Foil: J. Electrochem. Soc. 137, 653 (1990).
21. H. Masuda and K. Fukuda: Science 268, 1466 (1995).
22. O. Jessensky, F. Müller and U. Gösele: J. Electrochem. Soc. 145, 3735 (1998).
23. G. E. Thompson: Thin Solid Films 297, 192 (1997).
24. V. Lehmann: J. Electrochem. Soc. 140, 2836 (1993).
25. P. Schmuki, L, Santinacci, T. Djenician and D. J. Lockwood: Phys. Stat. Sol. (a) 482, 51 (2000).
26. H. Tsuchiya, M. Hüppe, T. Djenizian, P. Schmuki and S. Fujimoto: Science and Technology of Advanced Materials 5, 119-123 (2004).
27. S. Hasegawa, Y, Sasaki and S, Matsuhara: Sensors and Actuators B 13-14, (1993) 509.
28. H. Föil, S. Langa, J. Carstensen, M. Christophersen and I. M. Taginyanu: Advanced Materials 15 (2003), 183-198.
29. A. Hamamatsu, C. Kaneshiro, H. Fujikura and H. Hasegawa: J. EIectroanal. Chem. 473 (1999), 223-229.