Suppression of the reverse short channel effect in sub-micron CMOS devices

2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings

Volumn , Issue , 2003, Pages 420-421

  Thomason, Mike ^a   Prasad, Jagdish ^a   De Greve, Johan ^a  

^a ON SEMICONDUCTOR   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEFECTS; FIELD EFFECT TRANSISTORS; PILES; POINT DEFECTS; SEMICONDUCTOR DEVICES; THRESHOLD VOLTAGE;

CMOS DEVICES; GATE LENGTH; NMOS DEVICES; PMOS DEVICES; PROCESS STEPS; REVERSE SHORT CHANNEL EFFECTS; SUB MICRON; SUBMICRON DEVICES;

MOS DEVICES;

EID: 34347266274     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISDRS.2003.1272162     Document Type: Conference Paper

References (0)